621.395 / Sy68e
ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION I AND INTERCONNECT AND CONTACT METALLIZATION : proceedingsd... / edited by P. C. Andricacos [et al.] .- New Jersey: Electrochemical Society, 1999 .- viii, 274p.
ISBN: 1566772001
Subject Headings:
Semiconductors -- Design and construction -- Congresses;
Integrated Circuits -- Design and construction -- Congresses;
Electrochemistry -- Congresses;
Author Added Entry:
Andricacos, P.C. [ed.];
Dukovic, J. O. [ed.];
Mathad, G. S. [ed.];
Oleszek, G. M. [ed.];
Copy Details:
Acc. No.: A133810, Full Call No.: 621.395 Sy68e, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
ELECTROCHEMICAL PROCESSING IN ULSI FABRICATION I AND INTERCONNECT AND CONTACT METALLIZATION : proceedingsd... / edited by P. C. Andricacos [et al.] .- New Jersey: Electrochemical Society, 1999 .- viii, 274p.
ISBN: 1566772001
Subject Headings:
Semiconductors -- Design and construction -- Congresses;
Integrated Circuits -- Design and construction -- Congresses;
Electrochemistry -- Congresses;
Author Added Entry:
Andricacos, P.C. [ed.];
Dukovic, J. O. [ed.];
Mathad, G. S. [ed.];
Oleszek, G. M. [ed.];
Copy Details:
Acc. No.: A133810, Full Call No.: 621.395 Sy68e, Item type: Books , Location: General Stacks,
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