| 000 -LEADER |
|---|
| fixed length control field |
00663pam a2200205a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b2010 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9780387095103 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
IIT, Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
Ad17i |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Adams, Thomas M. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
Introductory MEMS |
| Remainder of title |
fabrication and applications |
| Statement of responsibility, etc. |
Thomas M. Adams and Richard A. Layton |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Springer Science+Business Media |
| Date of publication, distribution, etc. |
2010 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xv, 444p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectromechanical systems |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Electronic appratus and appliances |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Transducers |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
MEMS |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Layton, Richard A. |
| 997 ## - |
|---|
| -- |
A173656 C |
