621.381 / Ad17i
Adams, Thomas M.
Introductory MEMS : fabrication and applications / Thomas M. Adams and Richard A. Layton .- New York: Springer Science+Business Media, 2010 .- xv, 444p .
ISBN: 9780387095103
Subject Headings:
Microelectromechanical systems;
Electronic appratus and appliances;
Transducers;
MEMS;
Author Added Entry:
Layton, Richard A.;
Copy Details:
Acc. No.: A173656, Full Call No.: 621.381 Ad17i, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Adams, Thomas M.
Introductory MEMS : fabrication and applications / Thomas M. Adams and Richard A. Layton .- New York: Springer Science+Business Media, 2010 .- xv, 444p .
ISBN: 9780387095103
Subject Headings:
Microelectromechanical systems;
Electronic appratus and appliances;
Transducers;
MEMS;
Author Added Entry:
Layton, Richard A.;
Copy Details:
Acc. No.: A173656, Full Call No.: 621.381 Ad17i, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------