000 -LEADER |
fixed length control field |
00549pam a2200193a 44500 |
008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
fixed length control field |
160408b2003 xxu||||| |||| 00| 0 eng d |
020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
International Standard Book Number |
0306474972 |
082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
Classification number |
621.044 |
Item number |
C421L |
100 ## - MAIN ENTRY--PERSONAL NAME |
Personal name |
Chen,Francis F.,Chang,Jane P. |
245 1# - TITLE STATEMENT |
Title |
LECTURE NOTES ON PRINCIPLES OF PLASMA PROCESSING |
260 ## - PUBLICATION, DISTRIBUTION, ETC. |
Place of publication, distribution, etc. |
|
Name of publisher, distributor, etc. |
Kluwer Academic / Plenum Publishers,New York |
Date of publication, distribution, etc. |
2003 |
300 ## - PHYSICAL DESCRIPTION |
Extent |
ix,208 |
500 ## - GENERAL NOTE |
General note |
With Cd-Rom |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Plasma Engineering |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Plasma Chemistry |
650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
Topical term or geographic name entry element |
Plasma Dynamics |
964 ## - |
-- |
CIRC |
997 ## - |
-- |
A158049 C |