621.044 / C421L
Chen,Francis F.,Chang,Jane P.
LECTURE NOTES ON PRINCIPLES OF PLASMA PROCESSING / .- Kluwer Academic / Plenum Publishers,New York, 2003 .- ix,208 .
With Cd-Rom
ISBN: 0306474972
Subject Headings:
Plasma Engineering;
Plasma Chemistry;
Plasma Dynamics;
Copy Details:
Acc. No.: A158049, Full Call No.: 621.044 C421L, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Chen,Francis F.,Chang,Jane P.
LECTURE NOTES ON PRINCIPLES OF PLASMA PROCESSING / .- Kluwer Academic / Plenum Publishers,New York, 2003 .- ix,208 .
With Cd-Rom
ISBN: 0306474972
Subject Headings:
Plasma Engineering;
Plasma Chemistry;
Plasma Dynamics;
Copy Details:
Acc. No.: A158049, Full Call No.: 621.044 C421L, Item type: Books , Location: General Stacks,
------------------------- --------------------- ------ --------- ------- ------- --------- --------