| 000 -LEADER |
|---|
| fixed length control field |
00546pam a2200181a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1998 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471966827 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
SE52 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
S. A. Campbell,H. J. Lewerenz |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
SEMICONDUCTOR MICROMACHINING |
| Statement of responsibility, etc. |
TECHNIQUES AND INDUSTRIAL APPLICATIONS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
|
| Name of publisher, distributor, etc. |
John Wiley, Chichester |
| Date of publication, distribution, etc. |
1998 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii,389 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes Bibliographical References And Index |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Lewerenz,H. J. |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A129048 s C |
