621.38152 / SE52
S. A. Campbell,H. J. Lewerenz
SEMICONDUCTOR MICROMACHINING / TECHNIQUES AND INDUSTRIAL APPLICATIONS .- John Wiley, Chichester, 1998 .- xii,389 .
Includes Bibliographical References And Index
ISBN: 0471966827
Subject Headings:
Semiconductors;
Author Added Entry:
Lewerenz,H. J.;
Copy Details:
Acc. No.: A129048, Full Call No.: 621.38152 SE52, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
S. A. Campbell,H. J. Lewerenz
SEMICONDUCTOR MICROMACHINING / TECHNIQUES AND INDUSTRIAL APPLICATIONS .- John Wiley, Chichester, 1998 .- xii,389 .
Includes Bibliographical References And Index
ISBN: 0471966827
Subject Headings:
Semiconductors;
Author Added Entry:
Lewerenz,H. J.;
Copy Details:
Acc. No.: A129048, Full Call No.: 621.38152 SE52, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------