| 000 -LEADER |
|---|
| fixed length control field |
00645pam a2200205a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1989 xxu||||| |||| 00| 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0841214751 |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Item number |
M583 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Hess, Dennis W. |
| 245 1# - TITLE STATEMENT |
|---|
| Title |
MICROELECTRONICS PROCESSING |
| Statement of responsibility, etc. |
CHEMICAL ENGINEERING ASPECTS |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Washington, D. C. |
| Name of publisher, distributor, etc. |
American Chemical Society |
| Date of publication, distribution, etc. |
1989 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xiv,547 |
| 440 ## - SERIES STATEMENT/ADDED ENTRY--TITLE |
|---|
| Title |
Advances In Chemistry Series |
| Volume/sequential designation |
No. 221 |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Microelectronics -- Materials |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated Circuits -- Design And Construction |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Surface Chemistry |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Jensen, Klavs F. |
| 964 ## - |
|---|
| -- |
CIRC |
| 997 ## - |
|---|
| -- |
A107140 s C |
