621.381 / M583
Hess, Dennis W.
MICROELECTRONICS PROCESSING / CHEMICAL ENGINEERING ASPECTS .- Washington, D. C.: American Chemical Society, 1989 .- xiv,547 . .- ( Advances In Chemistry Series No. 221
ISBN: 0841214751
Subject Headings:
Microelectronics -- Materials;
Integrated Circuits -- Design And Construction;
Surface Chemistry;
Author Added Entry:
Jensen, Klavs F.;
Copy Details:
Acc. No.: A107140, Full Call No.: 621.381 M583, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
Hess, Dennis W.
MICROELECTRONICS PROCESSING / CHEMICAL ENGINEERING ASPECTS .- Washington, D. C.: American Chemical Society, 1989 .- xiv,547 . .- ( Advances In Chemistry Series No. 221
ISBN: 0841214751
Subject Headings:
Microelectronics -- Materials;
Integrated Circuits -- Design And Construction;
Surface Chemistry;
Author Added Entry:
Jensen, Klavs F.;
Copy Details:
Acc. No.: A107140, Full Call No.: 621.381 M583, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------