| 000 -LEADER |
|---|
| fixed length control field |
00580pam a2200157a 44500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
160408b1983 xxu||||| |||| 00| 0 eng d |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
P K Kelkar Library, IIT Kanpur |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38173 |
| Item number |
V849 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
|
| 245 1# - TITLE STATEMENT |
|---|
| Title |
VLSI electronics microstructure science [v.6] |
| Remainder of title |
materials and process characterization |
| Statement of responsibility, etc. |
edited by Norman G. Enspurch and Graydon B. Larrabee |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
New York |
| Name of publisher, distributor, etc. |
Academic Press |
| Date of publication, distribution, etc. |
1983 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xii, 598p |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Integrated circuit -- Very large scale integration |
| 700 ## - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Enspurch, Norman G., Ed. |
| 997 ## - |
|---|
| -- |
A86465 s C |
