621.38173 / V849
VLSI electronics microstructure science [v.6] : materials and process characterization / edited by Norman G. Enspurch and Graydon B. Larrabee .- New York: Academic Press, 1983 .- xii, 598p .
Subject Headings:
Integrated circuit -- Very large scale integration;
Author Added Entry:
Enspurch, Norman G., Ed.;
Copy Details:
Acc. No.: A86465, Full Call No.: 621.38173 V849, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
------------------------- --------------------- ------ --------- ------- ------- --------- --------
VLSI electronics microstructure science [v.6] : materials and process characterization / edited by Norman G. Enspurch and Graydon B. Larrabee .- New York: Academic Press, 1983 .- xii, 598p .
Subject Headings:
Integrated circuit -- Very large scale integration;
Author Added Entry:
Enspurch, Norman G., Ed.;
Copy Details:
Acc. No.: A86465, Full Call No.: 621.38173 V849, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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