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621.38152 / IM7F
       IMPURITY DIFFUSION AND GETTERING IN SILICON / edited by Fair, Richard B., Charles W. Pearce and Jack Washburn .- Pittsburgh: Materials Research Society, 1985 .- xiii, 284p. .- ( Materials research society symposia proceedings
Includes Bibliographical References And Index. "Proc.Of The Sym.On Impurity Diffusion And Gettering In Semiconductors...Held As Sym.C At The Mat.Res.Soc.Meeting,Nov.27-30,1984 In Boston."
ISBN: 0931837014
Subject Headings:
Semiconductors--Defects--Cong;
Diffusion--Cong;
Author Added Entry:
Washburn, Jack, ed.;
Pearce, Charles W., ed.;
Copy Details:
Acc. No.: A119153, Full Call No.: 621.38152 IM7F, Item type: Books , Location: COMPACT STORAGE (BASEMENT),
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