000			01485 a2200253 4500
003			OSt
005			20211216162649.0
008			211216b xxu||||| |||| 00| 0 eng d
020			_a9783030405588
040			_cIIT Kanpur
041			_aeng
082			_a621.381 _bH872p
100			_aHuff, Michael
245			_aProcess variations in microsystems manufacturing _cMichael Huff
260			_bSpringer _c2020 _aSwitzerland
300			_axix, 521p
440			_aMicrosystems and Nanosystems
490			_a/ edited by Roger T. Howe
520			_aThis book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
650			_aMicroelectromechanical systems
650			_aManufactures
650			_aNanotechnology
942			_cBK
999			_c565016 _d565016