000			01181 a2200253 4500
003			OSt
005			20210706131116.0
008			210204b xxu||||| |||| 00| 0 eng d
020			_a9783662443958
040			_cIIT Kanpur
041			_aeng
082			_a620.5 _bG229m
100			_aGatzen, Hans H.
245			_aMicro and Nano Fabrication [perpetual] _btools and processes _cHans H. Gatzen, Volker Saile and Jurg Leuthold
260			_bSpringer _c2015 _aNew York
300			_axxvi, 537p.
520			_aFor Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
650			_aMicroelectromechanical systems
650			_aMicrofabrication
700			_aSaile, Volker
700			_aLeuthold, Jürg
856			_uhttps://link.springer.com/book/10.1007/978-3-662-44395-8
942			_cEBK
999			_c563554 _d563554