000 | 00337nas a22000977a 4500 | ||
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008 | 170117s9999 xx 000 0 und d | ||
022 | _a1369-8001 | ||
245 |
_aMaterials Science in Semiconductor Processing _h[e-journal] |
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260 | _bElsevier | ||
856 |
_uhttp://www.sciencedirect.com/science/journal/13698001 _yeSS consortium 1998 - Current |
||
999 |
_c553499 _d553499 |