000 | 00327nas a22000977a 4500 | ||
---|---|---|---|
008 | 170117s9999 xx 000 0 und d | ||
022 | _a1057-7157 | ||
245 |
_aJournal of Microelectromechanical Systems _h[e-journal] |
||
260 | _bIEEE | ||
856 |
_uhttp://ieeexplore.ieee.org/servlet/opac?punumber=84 _yeSS consortium 1992 - Current |
||
999 |
_c552892 _d552892 |