000 00383nas a22000977a 4500
008 170117s9999 xx 000 0 und d
022 _a2166-0476
245 _aJournal of Micro and Nano-Manufacturing
_h[e-journal]
260 _bAmerican Society of Mechanical Engineers
856 _uhttp://micronanomanufacturing.asmedigitalcollection.asme.org/journal.aspx
_yeSS consortium 2013 - Current
999 _c552889
_d552889