000			03029nam a22005175i 4500
001			978-3-540-69562-2
003			DE-He213
005			20161121231201.0
007			cr nn 008mamaa
008			100301s2007 gw | s |||| 0|eng d
020			_a9783540695622 _9978-3-540-69562-2
024	7		_a10.1007/978-3-540-69562-2 _2doi
050		4	_aTA1-2040
072		7	_aTBC _2bicssc
072		7	_aTEC000000 _2bisacsh
082	0	4	_a620 _223
100	1		_aGraf, Markus. _eauthor.
245	1	0	_aCMOS Hotplate Chemical Microsensors _h[electronic resource] / _cby Markus Graf, Diego Barrettino, Henry P. Baltes, Andreas Hierlemann.
264		1	_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg, _c2007.
300			_aXII, 125 p. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aMicrotechnology and MEMS, _x1615-8326
505	0		_aMiniaturized Metal-Oxide Sensors -- Thermal Modelling of CMOS Microhotplates -- Microhotplates in CMOS Technology -- Monolithic Gas Sensor Systems -- Microsensor Arrays -- Conclusion and Outlook.
520			_aThis is the first comprehensive book on microhotplate-based chemical sensor systems in CMOS-technology. It covers all aspects of successful sensor prototyping: theory of transducer modelling, microelectronics design considerations, system design issues, and issues related to system and device microfabrication, packaging, and testing. A variety of different hotplates for different operation conditions is detailed and a family of metal-oxide-covered microhotplate-based microsensor systems with increasing complexity is presented. These systems belong to a new generation of chemical microsensors and represent examples of the successful integration of nanomaterials, microtechnology and microelectronics. The book provides students, scientists and engineers with an accessible introduction to the field of microhotplate-based chemical sensing, with all the necessary fundamental knowledge included. Beyond that, it also provides detailed information on all important issues concerning complex high-performance CMOS chemical microsensor systems; hence it will also be valuable to experts already familiar with the field.
650		0	_aEngineering.
650		0	_aPhysical chemistry.
650		0	_aOptical materials.
650		0	_aElectronic materials.
650	1	4	_aEngineering.
650	2	4	_aEngineering, general.
650	2	4	_aPhysical Chemistry.
650	2	4	_aOptical and Electronic Materials.
700	1		_aBarrettino, Diego. _eauthor.
700	1		_aBaltes, Henry P. _eauthor.
700	1		_aHierlemann, Andreas. _eauthor.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9783540695615
830		0	_aMicrotechnology and MEMS, _x1615-8326
856	4	0	_uhttp://dx.doi.org/10.1007/978-3-540-69562-2
912			_aZDB-2-ENG
950			_aEngineering (Springer-11647)
999			_c509793 _d509793