000 | 03184nam a22005055i 4500 | ||
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001 | 978-0-387-75577-9 | ||
003 | DE-He213 | ||
005 | 20161121231137.0 | ||
007 | cr nn 008mamaa | ||
008 | 100301s2008 xxu| s |||| 0|eng d | ||
020 |
_a9780387755779 _9978-0-387-75577-9 |
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024 | 7 |
_a10.1007/978-0-387-75577-9 _2doi |
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050 | 4 | _aT174.7 | |
050 | 4 | _aTA418.9.N35 | |
072 | 7 |
_aTBN _2bicssc |
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072 | 7 |
_aTEC027000 _2bisacsh |
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072 | 7 |
_aSCI050000 _2bisacsh |
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082 | 0 | 4 |
_a620.115 _223 |
100 | 1 |
_aCui, Zheng. _eauthor. |
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245 | 1 | 0 |
_aNanofabrication _h[electronic resource] : _bPrinciples, Capabilities and Limits / _cby Zheng Cui. |
264 | 1 |
_aBoston, MA : _bSpringer US, _c2008. |
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300 |
_aXIV, 343 p. 177 illus. _bonline resource. |
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336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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347 |
_atext file _bPDF _2rda |
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505 | 0 | _aNanofabrication by Photons -- Nanofabrication by Charged Beams -- Nanofabrication by Scanning Probes -- Nanofabrication by Replication -- Nanoscale Pattern Transfer -- Indirect Nanofabrication -- Nanofabrication by Self-Assembly. | |
520 | _aNanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed. Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including: Photon-based lithography Charged particle beams lithography Nanofabrication using scanning probes Nanoscale replication Nanoscale pattern transfer Indirect nanofabrication Nanofabrication by self-assembly Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications. Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering. | ||
650 | 0 | _aMaterials science. | |
650 | 0 | _aContinuum mechanics. | |
650 | 0 | _aOptical materials. | |
650 | 0 | _aElectronic materials. | |
650 | 0 | _aNanotechnology. | |
650 | 1 | 4 | _aMaterials Science. |
650 | 2 | 4 | _aNanotechnology. |
650 | 2 | 4 | _aMaterials Science, general. |
650 | 2 | 4 | _aContinuum Mechanics and Mechanics of Materials. |
650 | 2 | 4 | _aOptical and Electronic Materials. |
710 | 2 | _aSpringerLink (Online service) | |
773 | 0 | _tSpringer eBooks | |
776 | 0 | 8 |
_iPrinted edition: _z9780387755762 |
856 | 4 | 0 | _uhttp://dx.doi.org/10.1007/978-0-387-75577-9 |
912 | _aZDB-2-CMS | ||
950 | _aChemistry and Materials Science (Springer-11644) | ||
999 |
_c509213 _d509213 |