000 03184nam a22005055i 4500
001 978-0-387-75577-9
003 DE-He213
005 20161121231137.0
007 cr nn 008mamaa
008 100301s2008 xxu| s |||| 0|eng d
020 _a9780387755779
_9978-0-387-75577-9
024 7 _a10.1007/978-0-387-75577-9
_2doi
050 4 _aT174.7
050 4 _aTA418.9.N35
072 7 _aTBN
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aSCI050000
_2bisacsh
082 0 4 _a620.115
_223
100 1 _aCui, Zheng.
_eauthor.
245 1 0 _aNanofabrication
_h[electronic resource] :
_bPrinciples, Capabilities and Limits /
_cby Zheng Cui.
264 1 _aBoston, MA :
_bSpringer US,
_c2008.
300 _aXIV, 343 p. 177 illus.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aNanofabrication by Photons -- Nanofabrication by Charged Beams -- Nanofabrication by Scanning Probes -- Nanofabrication by Replication -- Nanoscale Pattern Transfer -- Indirect Nanofabrication -- Nanofabrication by Self-Assembly.
520 _aNanofabrication: Principles, Capabilities and Limits presents a one-stop description at the introductory level on most technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The capabilities of each technology in making sub-100nm structures are described. The limits of preventing a technology from further going down the dimensional scale are analyzed. Drawing upon years of practical experience and using numerous examples, Zheng Cui covers state-of-the art technologies in nanofabrication including: Photon-based lithography Charged particle beams lithography Nanofabrication using scanning probes Nanoscale replication Nanoscale pattern transfer Indirect nanofabrication Nanofabrication by self-assembly Nanofabrication: Principles, Capabilities and Limits will serve as a practical guide and first-hand reference for researchers and practitioners working in nanostructure fabrication and also provides a "tool box" of various techniques that can be easily adapted in different fields of applications. Written for: Nanoscience and nanotechnology researchers and engineers, technical professionals and academic researchers in the fields of electrtonics, mechanical engineering, and chemical engineering.
650 0 _aMaterials science.
650 0 _aContinuum mechanics.
650 0 _aOptical materials.
650 0 _aElectronic materials.
650 0 _aNanotechnology.
650 1 4 _aMaterials Science.
650 2 4 _aNanotechnology.
650 2 4 _aMaterials Science, general.
650 2 4 _aContinuum Mechanics and Mechanics of Materials.
650 2 4 _aOptical and Electronic Materials.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9780387755762
856 4 0 _uhttp://dx.doi.org/10.1007/978-0-387-75577-9
912 _aZDB-2-CMS
950 _aChemistry and Materials Science (Springer-11644)
999 _c509213
_d509213