000 04023nam a22005895i 4500
001 978-3-211-48549-1
003 DE-He213
005 20161121231115.0
007 cr nn 008mamaa
008 100715s2006 au | s |||| 0|eng d
020 _a9783211485491
_9978-3-211-48549-1
024 7 _a10.1007/978-3-211-48549-1
_2doi
050 4 _aTA174
072 7 _aTBD
_2bicssc
072 7 _aTEC016020
_2bisacsh
072 7 _aTEC016000
_2bisacsh
082 0 4 _a620.0042
_223
245 1 0 _aMicrosystems Mechanical Design
_h[electronic resource] /
_cedited by Francesco De Bona, Eniko T. Enikov.
264 1 _aVienna :
_bSpringer Vienna,
_c2006.
300 _aVIII, 212 p. 172 illus.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aCISM International Centre for Mechanical Sciences, Courses and Lectures ;
_v478
505 0 _ato Micro-Systems and to the Techniques for Their Fabrication -- Microstructures Under Electrostatic Loads: Discrete System Modelling -- Dynamics of Mechatronic Systems at Microscale -- Continuum Microstructures Loaded Electrostatically -- Design of Electro-Thermal Micro-Actuators: Mechanics and Electronic Position Detection -- Design of Compliant Micromechanisms -- Micro- and Nano-assembly and Manipulation Techniques for MEMS -- Microfluidics: Device Science and Technology.
520 _aNowadays, micromechanics (i.e., mechanics of microsystems) is probably one of the most promising and rapidly growing fields among new emerging technologies. In fact, the possibility of reducing the size of mechanical structures to the micro-domain opens a wide variety of possible applications in the biomedical, aeronautical, and automotive fields, in robotics, in molecular engineering, in fiber optics, and infiuidics technology. One of the main aspects that slows down the development of innovative industrial products based on microsystem technology is the existing lack of engineering tools to allow a reliable design of microsystems . The aim of this book is that of collecting the texts o the lectures given at the CISM course on: Microsystems Mechanical Design, hold in July 2004. The purpose of this course was to introduce the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies were also discussed and light was shed on the potential applications of microsystems to nano-scale manipulation of matter, thus introducing the topic of nano-scale engineering mechanics, which will be fully explored in a future course. This book is arranged in 8 sections. In the first section an introduction on microsystems and the techniques for their fabrication will be presented, with a thoroughly description of surface and bulk micromachining techniques and of other microfabrication processes as LIGA and anoding bonding.
650 0 _aEngineering.
650 0 _aComputational intelligence.
650 0 _aFluid mechanics.
650 0 _aEngineering design.
650 0 _aControl engineering.
650 0 _aRobotics.
650 0 _aMechatronics.
650 0 _aElectronics.
650 0 _aMicroelectronics.
650 1 4 _aEngineering.
650 2 4 _aEngineering Design.
650 2 4 _aComputational Intelligence.
650 2 4 _aEngineering Fluid Dynamics.
650 2 4 _aControl, Robotics, Mechatronics.
650 2 4 _aElectronics and Microelectronics, Instrumentation.
700 1 _aBona, Francesco De.
_eeditor.
700 1 _aEnikov, Eniko T.
_eeditor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783211374535
830 0 _aCISM International Centre for Mechanical Sciences, Courses and Lectures ;
_v478
856 4 0 _uhttp://dx.doi.org/10.1007/978-3-211-48549-1
912 _aZDB-2-ENG
950 _aEngineering (Springer-11647)
999 _c508682
_d508682