000 03335nam a22005055i 4500
001 978-3-540-29499-3
003 DE-He213
005 20161121231102.0
007 cr nn 008mamaa
008 100301s2005 gw | s |||| 0|eng d
020 _a9783540294993
_9978-3-540-29499-3
024 7 _a10.1007/3-540-29499-6
_2doi
050 4 _aTA1750-1750.22
072 7 _aTJFD
_2bicssc
072 7 _aTEC021000
_2bisacsh
072 7 _aTEC008080
_2bisacsh
082 0 4 _a620.11295
_223
082 0 4 _a620.11297
_223
100 1 _aPerevoschikov, Victor A.
_eauthor.
245 1 0 _aGettering Defects in Semiconductors
_h[electronic resource] /
_cby Victor A. Perevoschikov, Vladimir D. Skoupov.
264 1 _aBerlin, Heidelberg :
_bSpringer Berlin Heidelberg,
_c2005.
300 _aXVI, 388 p. 70 illus.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aSpringer Series in Advanced Microelectronics,
_x1437-0387 ;
_v19
505 0 _aBasic technological processes and defect formation in the components of device structures -- Effects of defects on electrophysical and functional parameters in semiconducting structures and devices -- Techniques for high-temperature gettering -- Physical foundations for low-temperature gettering techniques.
520 _aGettering Defects in Semiconductors fulfills three basic purposes: – to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; – to identify new directions in research, particularly to enhance the perspective of professionals and young researchers and specialists; – to fill a gap in the contemporary literature on the underlying semiconductor-material theory. The authors address not only well-established gettering techniques but also describe contemporary trends in gettering technologies from an international perspective. The types and properties of structural defects in semiconductors, their generating and their transforming mechanisms during fabrication are described. The primary emphasis is placed on classifying and describing specific gettering techniques, their specificity arising from both their position in a general technological process and the regimes of their application. This book addresses both engineers and material scientists interested in semiconducting materials theory and also undergraduate and graduate students in solid–state microelectronics and nanoelectronics. A comprehensive list of references provides readers with direction for further reading.
650 0 _aMaterials science.
650 0 _aChemical engineering.
650 0 _aOptical materials.
650 0 _aElectronic materials.
650 1 4 _aMaterials Science.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aIndustrial Chemistry/Chemical Engineering.
700 1 _aSkoupov, Vladimir D.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9783540262442
830 0 _aSpringer Series in Advanced Microelectronics,
_x1437-0387 ;
_v19
856 4 0 _uhttp://dx.doi.org/10.1007/3-540-29499-6
912 _aZDB-2-CMS
950 _aChemistry and Materials Science (Springer-11644)
999 _c508336
_d508336