000 03715nam a22005415i 4500
001 978-0-387-79108-1
003 DE-He213
005 20161121231042.0
007 cr nn 008mamaa
008 100301s2008 xxu| s |||| 0|eng d
020 _a9780387791081
_9978-0-387-79108-1
024 7 _a10.1007/978-0-387-79108-1
_2doi
050 4 _aQC170-197
050 4 _aQC717.6-718.8
072 7 _aPHM
_2bicssc
072 7 _aSCI074000
_2bisacsh
072 7 _aSCI051000
_2bisacsh
082 0 4 _a539
_223
100 1 _aAnders, André.
_eauthor.
245 1 0 _aCathodic Arcs
_h[electronic resource] :
_bFrom Fractal Spots to Energetic Condensation /
_cby André Anders.
264 1 _aNew York, NY :
_bSpringer New York :
_bImprint: Springer,
_c2008.
300 _aXVIII, 544 p.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aSpringer Series on Atomic, Optical, and Plasma Physics,
_x1615-5653 ;
_v50
505 0 _aA Brief History of Cathodic Arc Coating -- The Physics of Cathode Processes -- The Interelectrode Plasma -- Cathodic Arc Sources -- Macroparticles -- Macroparticle Filters -- Film Deposition by Energetic Condensation -- Reactive Deposition -- Some Applications of Cathodic Arc Coatings.
520 _aCathodic Arcs: From Fractal Spots to Energetic Condensation is the first book in over a decade dedicated to the physics and technology of cathodic arcs. It includes a detailed account of arc history, a textbook-like introduction to cathode phenomena, and some basic physics of expanding plasmas; it deals with the infamous macroparticle issue and describes a host of practical plasma filter solutions. In contrast to previous books on cathodic arcs, the focus is on the relation of arc plasmas and their properties to surface modification and thin film deposition. The book contains sections on basic plasma physics and thin film materials science. It also deals with practical issues of coatings such as stress control and the often-underrated issue of the coating’s color. By stressing the fractal nature of cathode spots, the theme of fluctuations can be found throughout the book: fluctuations affect all plasma properties and thereby have consequences for plasma-based surface modifications and film growth. Detailed explanations are complemented by compilations of plasma and materials data arranged in Periodic Tables. Cathodic Arcs: From Fractal Spots to Energetic Condensation is written with researchers and advanced students in the fields of materials science and plasma physics in mind. It is suitable both as a reference work for the expert as well as an introduction for newcomers to the interdisciplinary fields of plasma-surface interaction and plasma-assisted deposition of thin films.                                       .
650 0 _aPhysics.
650 0 _aChemical engineering.
650 0 _aAtoms.
650 0 _aCondensed matter.
650 0 _aMaterials
_xSurfaces.
650 0 _aThin films.
650 1 4 _aPhysics.
650 2 4 _aAtomic, Molecular, Optical and Plasma Physics.
650 2 4 _aIndustrial Chemistry/Chemical Engineering.
650 2 4 _aSurfaces and Interfaces, Thin Films.
650 2 4 _aCondensed Matter Physics.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9780387791074
830 0 _aSpringer Series on Atomic, Optical, and Plasma Physics,
_x1615-5653 ;
_v50
856 4 0 _uhttp://dx.doi.org/10.1007/978-0-387-79108-1
912 _aZDB-2-PHA
950 _aPhysics and Astronomy (Springer-11651)
999 _c507831
_d507831