000 03172nam a22004215i 4500
001 978-0-387-23037-5
003 DE-He213
005 20161121231011.0
007 cr nn 008mamaa
008 100301s2005 xxu| s |||| 0|eng d
020 _a9780387230375
_9978-0-387-23037-5
024 7 _a10.1007/b100026
_2doi
050 4 _aTJ1-1570
072 7 _aTGB
_2bicssc
072 7 _aTEC009070
_2bisacsh
082 0 4 _a621
_223
100 1 _aLobontiu, Nicolae.
_eauthor.
245 1 0 _aMechanics of Microelectromechanical Systems
_h[electronic resource] /
_cby Nicolae Lobontiu, Ephrahim Garcia.
264 1 _aBoston, MA :
_bSpringer US,
_c2005.
300 _aXI, 405 p.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aStiffness Basics -- Microcantilevers, Microhinges, Microbridges -- Microsuspensions -- Microtransduction: Actuation and Sensing -- Static Response of Mems -- Microfabrication, Materials, Precision and Scaling.
520 _aThis book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.
650 0 _aEngineering.
650 0 _aMechanical engineering.
650 1 4 _aEngineering.
650 2 4 _aMechanical Engineering.
700 1 _aGarcia, Ephrahim.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9781402080135
856 4 0 _uhttp://dx.doi.org/10.1007/b100026
912 _aZDB-2-ENG
950 _aEngineering (Springer-11647)
999 _c507079
_d507079