000 04906nam a22005535i 4500
001 978-0-387-23313-0
003 DE-He213
005 20161121230936.0
007 cr nn 008mamaa
008 100301s2005 xxu| s |||| 0|eng d
020 _a9780387233130
_9978-0-387-23313-0
024 7 _a10.1007/b101190
_2doi
050 4 _aQC173.45-173.458
072 7 _aPHF
_2bicssc
072 7 _aSCI077000
_2bisacsh
082 0 4 _a530.41
_223
245 1 0 _aIntroduction to Focused Ion Beams
_h[electronic resource] :
_bInstrumentation, Theory, Techniques and Practice /
_cedited by Lucille A. Giannuzzi, Fred A. Stevie.
264 1 _aBoston, MA :
_bSpringer US,
_c2005.
300 _aXVIII, 358 p. 193 illus.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
505 0 _aThe Focused Ion Beam Instrument -- Ion - Solid Interactions -- Focused Ion Beam Gases for Deposition and Enhanced Etch -- Three-Dimensional Nanofabrication Using Focused Ion Beams -- Device Edits and Modifications -- The Uses of Dual Beam FIB in Microelectronic Failure Analysis -- High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy -- FIB for Materials Science Applications - a Review -- Practical Aspects of FIB Tem Specimen Preparation -- FIB Lift-Out Specimen Preparation Techniques -- A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method -- Dual-Beam (FIB-SEM) Systems -- Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS) -- Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy -- Application of FIB in Combination with Auger Electron Spectroscopy.
520 _aThe focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It has taken its place among the suite of other instruments commonly available in analytical and forensic laboratories, universities, geological, medical and biological research institutions, and manufacturing plants. Although the utility of the FIB is not limited to the preparation of specimens for subsequent analysis by other analytical techniques, it has revolutionized the area of TEM specimen preparation. The FIB has also been used to prepare samples for numerous other analytical techniques, and offers a wide range of other capabilities. While the mainstream of FIB usage remains within the semiconductor industry, FIB usage has expanded to applications in metallurgy, ceramics, composites, polymers, geology, art, biology, pharmaceuticals, forensics, and other disciplines. Computer automated procedures have been configured for unattended use of FIB and dual platform instruments. New applications of FIB and dual platform instrumentation are constantly being developed for materials characterization and nanotechnology. The site specific nature of the FIB milling and deposition capabilities allows preparation and processing of materials in ways that are limited only by one's imagination. Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments.
650 0 _aPhysics.
650 0 _aCondensed matter.
650 0 _aSolid state physics.
650 0 _aSpectroscopy.
650 0 _aMicroscopy.
650 0 _aOptical materials.
650 0 _aElectronic materials.
650 0 _aMaterials
_xSurfaces.
650 0 _aThin films.
650 1 4 _aPhysics.
650 2 4 _aCondensed Matter Physics.
650 2 4 _aSurfaces and Interfaces, Thin Films.
650 2 4 _aOptical and Electronic Materials.
650 2 4 _aSolid State Physics.
650 2 4 _aSpectroscopy and Microscopy.
700 1 _aGiannuzzi, Lucille A.
_eeditor.
700 1 _aStevie, Fred A.
_eeditor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9780387231167
856 4 0 _uhttp://dx.doi.org/10.1007/b101190
912 _aZDB-2-PHA
950 _aPhysics and Astronomy (Springer-11651)
999 _c506225
_d506225