| 000 | 00315pas a2200097 454500 | ||
|---|---|---|---|
| 008 | 160820b1999 xxu||||| |||| 00| 0 eng d | ||
| 022 | _a1369-8001 | ||
| 245 | _aMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING | ||
| 260 |
_aAMESTERDAM NETHERLANDS _bELSEVIER _c1999 |
||
| 906 |
_a9(1), 2006+ _b6/Yr _cSubscribed _dJan - Dec,2008 |
||
| 999 |
_c475805 _d475805 |
||