000 00275pas a2200097 454500
008 160820b1983 xxu||||| |||| 00| 0 eng d
022 _a0167-9317
245 _aMICROELECTRONIC ENGINEERING
260 _aAMSTERDAM, NL
_bELSEVIER SCIENCE BV
_c1983
906 _a
_b
_c
_dJan - Dec,2008
999 _c475449
_d475449