000
00275pas a2200097 454500
008
160820b1983 xxu||||| |||| 00| 0 eng d
022
_a
0167-9317
245
_a
MICROELECTRONIC ENGINEERING
260
_a
AMSTERDAM, NL
_b
ELSEVIER SCIENCE BV
_c
1983
906
_a
_b
_c
_d
Jan - Dec,2008
999
_c
475449
_d
475449