000 00275pas a2200097 454500
008 160820b1992 xxu||||| |||| 00| 0 eng d
022 _a1074-407X
245 _aMICROLITHOGRAPHY WORLD
260 _aNASHUA, NH
_bPENNWELL PUBLISHING COMPANY
_c1992
906 _a
_b
_c
_dJan - Dec,2008
999 _c475266
_d475266