| 000 | 00303pas a2200097 454500 | ||
|---|---|---|---|
| 008 | 160820b1988 xxu||||| |||| 00| 0 eng d | ||
| 022 | _a0894-6507 | ||
| 245 | _aIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING | ||
| 260 |
_aPISCATA WAY USA _bIEEE _c1988 |
||
| 906 |
_a21(1), 2008+ _b4/Yr _cPrint _dJan - Dec,2014 |
||
| 999 |
_c474855 _d474855 |
||