| 000 | 00339pas a2200097 454500 | ||
|---|---|---|---|
| 008 | 160820b1964 xxu||||| |||| 00| 0 eng d | ||
| 022 | _a0734-2101 | ||
| 245 | _aJOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A: VACUUM SURFACES AND FILMS | ||
| 260 |
_a USA _bAMERICAN INSTITUTE OF PHYSICS _c1964 |
||
| 906 |
_a26(1), 2008+ _b6/Yr _cOnline _dJan - Dec,2016 |
||
| 999 |
_c474230 _d474230 |
||