000 00269pas a2200097 454500
008 160820b xxu||||| |||| 00| 0 eng d
022 _a
245 _aHISTORY OF VACUUM SCIENCE AND TECHNOLOGY
260 _aNEWYORK
_bAMERICAN VACUUM SOCIETY
_c
906 _a
_b
_c
_dJan - Dec,2008
999 _c473546
_d473546