000 00295pas a2200097 454500
008 160820b1971 xxu||||| |||| 00| 0 eng d
022 _a0361-5235
245 _aJOURNAL OF ELECTRONIC MATERIALS
260 _aNEW YORK UK
_bSPRINGER-VERLAG
_c1971
906 _a37(1), 2008+
_b12/Yr
_cOnline
_dJan - Dec,2016
999 _c473394
_d473394