000 00295pas a2200097 454500
008 160820b1964 xxu||||| |||| 00| 0 eng d
022 _a0022-5355
245 _aJOURNAL OF VACUUM SCIENCE SCIENCE AND TECHNOLOGY
260 _aMELVILLE
_bAMERICAN VACUUM SOCIETY
_c1964
906 _a
_b
_c
_dJan - Dec,2008
999 _c473026
_d473026