| 000 | 00536n a2200169ua 4500 | ||
|---|---|---|---|
| 020 | _a9780878493210 | ||
| 040 | _aIIT, Kanpur | ||
| 082 |
_a620.5 _bIn8n |
||
| 111 |
_aInternational Conference on Materials for Advanced Technologies _cSingapore _d2009 |
||
| 245 | 1 |
_aNEMS/MEMS technology and devices _cedited by Selin Teo ...[et al.] |
|
| 260 |
_aSwitzerland _bTrans Tech Publictions Ltd. _c2009 |
||
| 300 | _axi, 348p | ||
| 650 | _aNems | ||
| 700 | _aTeo, Selin, Ed. | ||
| 700 | _a | ||
| 997 | _aA168655 C | ||
| 999 |
_c469047 _d469047 |
||