| 000 | 00725 a2200205 4500 | ||
|---|---|---|---|
| 020 | _a0735402779 | ||
| 082 |
_a621.395 _bIn8c |
||
| 111 |
_aInternational Conference on Characterization and Metrology for ULSI Technology _cRichardson, Texas _d2005 |
||
| 245 | 1 |
_aCharacterization and Metrology for ULSI Technology _ceditors, David G. Seiler ... [et al.] |
|
| 260 |
_aNew York _bAmerican Institute Of Physics,New York _c2005 |
||
| 300 | _axx, 667p. | ||
| 490 | _aAIP conference proceedings | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | _aMetrology | ||
| 700 | _aSeiler, David G.(Ed.) | ||
| 700 | _a | ||
| 830 | _aAIP conference proceedings ; | ||
| 830 | _vv. no.788. | ||
| 997 | _aA161303 s C | ||
| 999 |
_c468798 _d468798 |
||