| 000 | 00649 a2200193 4500 | ||
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| 020 | _a0819453064 | ||
| 082 |
_a621.381 _bSM25V |
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| 245 | 1 |
_aSMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY V.5389 _cPROCEEDINGS ON SMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY ( 2004 : CALIFORNIA) |
|
| 260 |
_a _bSpie-The International Soc. For Optical Engg., Washington _c2004 |
||
| 300 | _ax,498 | ||
| 650 | _aMicroelectronics -- Materials -- Congresses | ||
| 650 | _aSmart Materials -- Congresses | ||
| 650 | _aActrators -- Congresses | ||
| 700 | _aVaradan,Vijay K. | ||
| 700 | _a | ||
| 906 | _h0 | ||
| 964 | _gCIRC | ||
| 997 | _aA155491 s C | ||
| 999 |
_c468654 _d468654 |
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