| 000 | 00794 a2200229 4500 | ||
|---|---|---|---|
| 020 | _a3908450829 | ||
| 082 |
_a621.38152 _bIN82 |
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| 245 | 1 |
_aGETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, GADEST 2003 _cINTERNATIONAL AUTUMN MEETING ON GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY(10TH: 2003: BRANDENBURG, GERMANY |
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| 260 |
_a _bScitec Publications Ltd., Switzerland _c2004 |
||
| 300 | _axvi,682 | ||
| 440 |
_aSolid State Phenomena, Part B Of"Diffusion And Defect Data" _v |
||
| 650 | _aSemiconductors -- Congresses | ||
| 650 | _aGetters -- Congresses | ||
| 650 | _aSilicon Crystals -- Defects -- Congresses | ||
| 700 | _aRichter,H. | ||
| 700 | _a | ||
| 700 | _aKittler,M. | ||
| 700 | _a | ||
| 906 | _h0 | ||
| 964 | _gCIRC | ||
| 997 | _aA151260 s C | ||
| 999 |
_c468525 _d468525 |
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