000 00620 a2200241 4500
020 _a0769521894
082 _a620.5
_bIN8
245 1 _aMEMS, NANO AND SMART SYSTEMS
_cINTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS (2004: CANFF, CANADA)
260 _a
_bIeee Computer Society Press, Los Alamitos
_c2004
300 _axxiv,711
650 _aNano
650 _aSmart Systems
650 _aIcmens
700 _aBadawy,Wael
700 _a
700 _aMoussa,Walied
700 _a
700 _aWael Badawy,Walied Moussa
700 _a
906 _h0
964 _gCIRC
997 _aA148858 s C
999 _c468334
_d468334