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| 020 | _a0819449768 | ||
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_a621.381 _bSM25C |
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_aSMART SENSORS, ACTUATORS, AND MEMS _cPROCEEDINGS ON SMART SENSORS, ACTUATORS, AND MEMS (2003 : FLORIDA) |
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| 260 |
_a _bSpie-The International Soc. For Optical Engg., Washington _c2003 |
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| 300 | _axii,928 | ||
| 650 | _aMicroelectrochemical Systems -- Congresses | ||
| 650 | _aMicrotechnology -- Congresses | ||
| 700 | _aChiao,Jung-Chih,Varadan,Vijay K | ||
| 700 | _a | ||
| 700 | _aCane,Carles | ||
| 700 | _a | ||
| 700 | _aJung-Chih Chiao,Vijay K Varadan,Carles Cane | ||
| 700 | _a | ||
| 906 | _h0 | ||
| 964 | _gCIRC | ||
| 997 | _aA145957 s C | ||
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