| 000 | 00751 a2200241 4500 | ||
|---|---|---|---|
| 020 | _a0819448605 | ||
| 082 |
_a621.381 _bSM25V |
||
| 245 | 1 |
_aSMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY _cPROCEEDINGS ON SMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY (2003 : FLORIDA) |
|
| 260 |
_a _bSpie-The International Soc. For Optical Engg., Washington _c2003 |
||
| 300 | _axxiii,394 | ||
| 650 | _aMicroelectronics -- Materials -- Congresses | ||
| 650 | _aSmart Materials -- Congresses | ||
| 650 | _aActrators -- Congresses | ||
| 700 | _aVaradan,Vijay K | ||
| 700 | _a | ||
| 700 | _aKish,Laszlo B | ||
| 700 | _a | ||
| 700 | _aVijay K Varadan,Laszlo B Kish | ||
| 700 | _a | ||
| 906 | _h0 | ||
| 964 | _gCIRC | ||
| 997 | _aA145956 s C | ||
| 999 |
_c468270 _d468270 |
||