000 00777 a2200217 4500
020 _a3908450640
082 _a621.38152
_bIN8G
100 _aV. Raineri,No
245 1 _aGETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY
_bGADEST 2001
_cINTERNATIONAL AUTUMN MEETING "GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY" (9TH : 2001 : S. TECLA, ITALY)
260 _a
_bScitec Publications, Zuerich
_cc2002
300 _axviii,823
440 _aDiffusion And Defect Data
_vPt.B -- Solid State Phenomena
650 _aSemiconductors -- Defects -- Congresses
650 _aGetters -- Congresses
650 _aSilicon Crystals -- Defects -- Congresses
700 _aRaineri,V.
700 _a
906 _h0
964 _gCIRC
997 _aA143109 s C
999 _c467995
_d467995