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| 005 | 20170508151700.0 | ||
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| 020 | _a1566772001 | ||
| 040 | _cIITK | ||
| 041 | _aeng | ||
| 082 |
_a621.395 _bSy68e |
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| 245 | 1 |
_aELECTROCHEMICAL PROCESSING IN ULSI FABRICATION I AND INTERCONNECT AND CONTACT METALLIZATION _bproceedingsd... _cedited by P. C. Andricacos [et al.] |
|
| 260 |
_aNew Jersey _bElectrochemical Society _c1999 |
||
| 300 | _aviii, 274p | ||
| 650 | _aSemiconductors -- Design and construction -- Congresses | ||
| 650 | _aIntegrated Circuits -- Design and construction -- Congresses | ||
| 650 | _aElectrochemistry -- Congresses | ||
| 700 | _aAndricacos, P.C. [ed.] | ||
| 700 | _aDukovic, J. O. [ed.] | ||
| 700 | _aMathad, G. S. [ed.] | ||
| 700 | _aOleszek, G. M. [ed.] | ||
| 942 | _cBK | ||
| 999 |
_c467487 _d467487 |
||