| 000 | 00550 a2200181 4500 | ||
|---|---|---|---|
| 020 | _a390845039X | ||
| 082 |
_a621.38152 _bIN8 |
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| 100 | _aM No Kittler | ||
| 245 | 1 |
_aBEAM INJECTION ASESSMENT OF DEFECTS IN SEMICONDUCTORS _cINTERNATIONAL WORKSHOP ON BEAM INJECTION ASSESSMENT OF DEFECTS IN SEMICONDUCTORS(5TH:1998:BERLIN) |
|
| 260 |
_a _bScitech Publishing,Mendham, N.J. _c1998 |
||
| 300 | _axiv,537 | ||
| 650 | _aSemiconductors -- Congresses | ||
| 700 | _aKittler,M | ||
| 700 | _a | ||
| 906 | _h0 | ||
| 964 | _gCIRC | ||
| 997 | _aA129623 s C | ||
| 999 |
_c467380 _d467380 |
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