| 000 | 00690 a2200205 4500 | ||
|---|---|---|---|
| 020 | _a1558994319 | ||
| 082 |
_a621.38152 _bSY68O |
||
| 100 | _aMehmet C. Ozturk | ||
| 245 | 1 |
_aRAPID THERMAL AND INTEGRATED PROCESSING VII _cSYMPOSIUM ON RAPID THERMAL AND INTEGRATED PROCESSING VII (1998 : SAN FRANCISCO, CALIFORNIA) |
|
| 260 |
_a _bMaterials Research Society,Warrendale _c1998 |
||
| 300 | _axiii,403 | ||
| 440 |
_aMeterials Research Society Symposium Proceedings _v |
||
| 650 | _aSemiconductors -- Heat Treatment -- Congresses | ||
| 650 | _aSemiconductors Doping -- Congresses | ||
| 700 | _aOzturk,Mehmet C. | ||
| 700 | _a | ||
| 906 | _h0 | ||
| 964 | _gCIRC | ||
| 997 | _aA128539 s C | ||
| 999 |
_c467320 _d467320 |
||