000 00664 a2200217 4500
020 _a1566771935(SET)
082 _a621.38152
_bIN8S
245 1 _aSILICON MATERIALS SCIENCE AND TECHNOLOGY
_cINTERNATIONAL SYMPOSIUM ON SILICON MATERIALS SCIENCE AND TECHNOLOGY(8TH : 1998 : SAN DIEGO)
260 _a
_bElectrochemical Society, Pennington,Nj
_c1998
300 _a
500 _a"Cover Title : Semiconductor Silicon 1998".
650 _aSemiconductors -- Congresses
650 _aSilicon Crystals -- Congresses
700 _aHuff,H R, Tsuya,H
700 _a
700 _aGosele,U
700 _a
906 _h0
964 _gCIRC
997 _aA127626 s C
999 _c467305
_d467305