| 000 | 00519 a2200169 4500 | ||
|---|---|---|---|
| 020 | _a0444884297 | ||
| 082 |
_a621.38152 _bIn8d |
||
| 245 | 1 |
_aDEFECT CONTROL IN SEMICONDUCTORS _cINTERNATIONAL CONFERENCE ON THE SCIENCE AND TECHNOLOGY OF DEFECT CONTROL IN SEMICONDUCTORS (1989 : YOKOHAMA, JAPAN) |
|
| 260 |
_aAmsterdam _bNorth-Holland _c1990 |
||
| 300 | _a2 v. | ||
| 650 | _aSemiconductors -- Defects -- Cong | ||
| 700 | _aSumino, K. | ||
| 700 | _a | ||
| 906 | _h1989 | ||
| 964 | _gCIRC | ||
| 997 | _aA111108 v. 1 s C | ||
| 999 |
_c466785 _d466785 |
||