| 000 | 00346 a2200145 4500 | ||
|---|---|---|---|
| 082 |
_a621.38152 _bIn8i |
||
| 100 | _aChernov, Fred | ||
| 245 | 1 | _aION IMPLANTATION IN SEMICONDUCTORS, 1976 | |
| 260 |
_aNew York _bPlenum Press _cc1977 |
||
| 300 | _axiv,754 | ||
| 700 | _aBorders, James A. | ||
| 700 | _a | ||
| 964 | _gCIRC | ||
| 997 | _aA57523 s C | ||
| 999 |
_c462638 _d462638 |
||