000 00325 a2200133 4500
082 _a621.55
_bAm35
245 1 _aEXPERIMENTAL VACUUM SCIENCE AND TECHNOLOGY
260 _aN. Y.
_bMarcel Dekker
_c1973
300 _a237
500 _aBibl. : P. 227-230
650 _aVacuum Technology
964 _gCIRC
997 _aA27783 C
999 _c460878
_d460878