000 | 00325 a2200133 4500 | ||
---|---|---|---|
082 |
_a621.55 _bAm35 |
||
245 | 1 | _aEXPERIMENTAL VACUUM SCIENCE AND TECHNOLOGY | |
260 |
_aN. Y. _bMarcel Dekker _c1973 |
||
300 | _a237 | ||
500 | _aBibl. : P. 227-230 | ||
650 | _aVacuum Technology | ||
964 | _gCIRC | ||
997 | _aA27783 C | ||
999 |
_c460878 _d460878 |