| 000 | 00492 a2200169 4500 | ||
|---|---|---|---|
| 082 |
_a661.0683 _bSy68 |
||
| 245 | 1 |
_aSILICON DEVICE PROCESSING _cSYMPOSIUM ON SILICON DEVICE PROCESSING (1970 : GAITHERSBURG) |
|
| 260 |
_aWashington _bNational Bureau Of Standards _c1970 |
||
| 300 | _a457 | ||
| 440 |
_aNational Bureau Of Standards Special Publication _v337 |
||
| 650 | _aSilicon | ||
| 700 | _aMarsden, Charles P. | ||
| 700 | _a | ||
| 906 | _h1970 | ||
| 964 | _gCIRC | ||
| 997 | _aA14880 s C | ||
| 999 |
_c459087 _d459087 |
||