| 000 | 00495 a2200181 4500 | ||
|---|---|---|---|
| 082 |
_a621.3815 _bC7605u |
||
| 245 | 1 |
_aULTRAPURIFICATION OF SEMICONDUCTOR MATERIALS _cCONFERENCE ON ULTRAPURIFICATION OF SEMICONDUCTOR MATERIALS (1961 : BOSTON) |
|
| 260 |
_aN. Y. _bMacmillan _c1962 |
||
| 300 | _a655 | ||
| 650 | _aSemiconductors -- Congresses | ||
| 700 | _aBrooks, M. S. | ||
| 700 | _a | ||
| 700 | _aKennedy, J. K. | ||
| 700 | _a | ||
| 906 | _h1961 | ||
| 964 | _gCIRC | ||
| 997 | _a73338 s C | ||
| 999 |
_c456420 _d456420 |
||