000 00312pam a2200133a 44500
082 _a621.55
_bSt35h
100 _aSteinherz, H. A.
245 1 _aHANDBOOK OF HIGH VACUUM ENGINEERING
260 _aN. Y.
_bReinhold
_c1963
300 _a358
650 _aVacuum Technology
964 _gREF
997 _a29911 S R
999 _c436606
_d436606